Investigation of the surface layer formed during the processing of quartz glass using mechanochemical and ionic polishing

Quantitative studies of the optical parameters surface layer formed during polishing quartz glass have been carried out. It is shown that mechanism formation when using methods mechanochemical and ion has much in common. In both cases, appearance a layer, which differs by high refractive index from corresponding bulk properties glass, associated with stress breaking Si-O-Si bridge bonds hydrolysis polishing. The Si-O Si-OH groups, leads to an increase layer. Keywords: ionic polishing, groups.